LAM Research – Metrology Suite Renovation:

LAM Research – Metrology Suite Renovation:

FMS was engaged as the project’s EMI Consultant to site and house a Transmission Electron Microscope (TEM) and several Scanning Electron Microscopes (SEM’s) inside the Metrology Laboratory at the Fremont, CA location.  The ambient magnetic field analysis concluded the proposed siting location for the electron microscopes would be affected by internal interference issues such as Quasi-DC and power frequency AC (60 Hz) magnetic fields.

FMS, working in tandem with the architect and MEP designers, developed and installed a robust shielding scheme inside the TEM/SEM suites to mitigate EMI threat conditions to acceptable, low field levels.  FMS also implemented an Active Compensation System (ACS) inside the TEM suite to minimize Quasi-DC interference from localized DC perturbations and nearby construction.